Fabrication of high aspect ratio (> 100:1) nanopillar array based on thiol-ene

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	Fabrication of high aspect ratio (> 100:1) nanopillar array based on thiol-ene
	Zhang, Man; Deng, Qiling; Shi, Lifang; Cao, Axiu; Pang, Hui; Hu, Song
刊名	MICROELECTRONIC ENGINEERING
	2016-01-05
卷号	149 页码:52-56
关键词	Nanopillar array High aspect ratio Thiol-ene AAO template
ISSN号	0167-9317
英文摘要	Nanopillar arrays have attracted considerable attention lately based on confinement effects and large surface to volume ratios. In this study, we demonstrated an efficient low-cost method for fabrication of large-area high aspect ratio nanopillars based on thiol-ene. Anodic aluminum oxide (AAO) template with ordered deep hole array was employed as the master mold. The low-viscosity and highly rigid UV-curable thiol-ene polymer was used as the structure material. The deep holes were filled with the liquid thiol-ene by overcoming the surface tension. Upon curing under UV irradiation, the thiol-ene formed a rigid cross-linked polymer network. The thiol-ene nanopillars were achieved after releasing the AAO mold in the corrosive solution, due to the corrosive-resistance of the cross-linked polymer. Based on the novel method, we fabricated thiol-ene nanopillar array with the diameter of 296 nm and aspect ratio of higher than 100:1. The experimental results demonstrated that the properties of thiol-ene polymer were excellent and the fabrication method was feasible. (C) 2015 Elsevier B.V. All rights reserved.
WOS标题词	Science & Technology ; Technology ; Physical Sciences
类目[WOS]	Engineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Optics ; Physics, Applied
研究领域[WOS]	Engineering ; Science & Technology - Other Topics ; Optics ; Physics
关键词[WOS]	NANOIMPRINT LITHOGRAPHY NIL ; SILICON NANOPILLARS ; FIELD ; NANOWIRES ; CHEMISTRY ; FEATURES
收录类别	SCI
语种	英语
WOS记录号	WOS:000367420200010
公开日期	2016-02-26
内容类型	期刊论文
源URL	[http://ir.ioe.ac.cn/handle/181551/3791]
专题	光电技术研究所_光电技术研究所被WoS收录文章
作者单位	Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China
推荐引用方式 GB/T 7714	Zhang, Man,Deng, Qiling,Shi, Lifang,et al. Fabrication of high aspect ratio (> 100:1) nanopillar array based on thiol-ene[J]. MICROELECTRONIC ENGINEERING,2016,149:52-56.
APA	Zhang, Man,Deng, Qiling,Shi, Lifang,Cao, Axiu,Pang, Hui,&Hu, Song.(2016).Fabrication of high aspect ratio (> 100:1) nanopillar array based on thiol-ene.MICROELECTRONIC ENGINEERING,149,52-56.
MLA	Zhang, Man,et al."Fabrication of high aspect ratio (> 100:1) nanopillar array based on thiol-ene".MICROELECTRONIC ENGINEERING 149(2016):52-56.