Fluoride coatings for vacuum ultraviolet reflection filters

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	Fluoride coatings for vacuum ultraviolet reflection filters
	Guo, Chun 1; Kong, Mingdong 1,2; Lin, Dawei 1; Li, Bincheng 1,3
刊名	APPLIED OPTICS
	2015-12-10
卷号	54 期号:35 页码:10498-10503
ISSN号	1559-128X
英文摘要	LaF3/MgF2 reflection filters with a high spectral-discrimination capacity of the atomic-oxygen lines at 130.4 and 135.6 nm, which were employed in vacuum ultraviolet imagers, were prepared by molybdenum-boat thermal evaporation. The optical properties of reflection filters were characterized by a high-precision vacuum ultraviolet spectrophotometer. The vulnerability of the filter's microstructures to environmental contamination and the recovery of the optical properties of the stored filter samples with ultraviolet ozone cleaning were experimentally demonstrated. For reflection filters with the optimized nonquarter-wave multilayer structures, the reflectance ratios R-135.6nm/R-130.4nm of 92.7 and 20.6 were achieved for 7 degrees and 45 degrees angles of incidence, respectively. On the contrary, R135.6nm/R130.4nm ratio of 12.4 was obtained for a reflection filter with a standard p-stack multilayer structure with H/L = 1/4 at 7 degrees AOI. (C) 2015 Optical Society of America
WOS标题词	Science & Technology ; Physical Sciences
类目[WOS]	Optics
研究领域[WOS]	Optics
关键词[WOS]	THIN-FILMS ; 193 NM ; BOAT EVAPORATION ; NARROW-BAND ; MICROSTRUCTURE ; MGF2
收录类别	SCI
语种	英语
WOS记录号	WOS:000366605900029
公开日期	2016-02-26
内容类型	期刊论文
源URL	[http://ir.ioe.ac.cn/handle/181551/3783]
专题	光电技术研究所_光电技术研究所被WoS收录文章
作者单位	1.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China 2.Univ Chinese Acad Sci, Beijing 100039, Peoples R China 3.Univ Elect Sci & Technol China, Sch Optelect Informat, Chengdu 610054, Peoples R China
推荐引用方式 GB/T 7714	Guo, Chun,Kong, Mingdong,Lin, Dawei,et al. Fluoride coatings for vacuum ultraviolet reflection filters[J]. APPLIED OPTICS,2015,54(35):10498-10503.
APA	Guo, Chun,Kong, Mingdong,Lin, Dawei,&Li, Bincheng.(2015).Fluoride coatings for vacuum ultraviolet reflection filters.APPLIED OPTICS,54(35),10498-10503.
MLA	Guo, Chun,et al."Fluoride coatings for vacuum ultraviolet reflection filters".APPLIED OPTICS 54.35(2015):10498-10503.