ELECTRONIC SPECTROSCOPY STUDIES OF A P2S5NH4OH TREATED GAS(100) SURFACE

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	ELECTRONIC SPECTROSCOPY STUDIES OF A P2S5NH4OH TREATED GAS(100) SURFACE
	ZHONG ZT ; LUO WZ ; MOU SM ; ZHANG KY ; LI X ; LI CF
刊名	chinese physics
	1992
卷号	12 期号:4 页码:853-858
关键词	SCHOTTKY-BARRIER SODIUM SULFIDE GAAS 100 PASSIVATION MODEL
ISSN号	0273-429x
通讯作者	zhong zt acad sinicainst semicondbeijing 100083peoples r china
中文摘要	microscopic characteristics of the gaas(100) surface treated with p2s5/nh4oh solution has been investigated by using auger-electron spectroscopy (aes) and x-ray photoemission spectroscopy (xps). aes reveals that only phosphorus and sulfur, but not oxygen, are contained in the interface between passivation film and gaas substrate. using xps it is found that both ga2o3 and as2o3 are removed from the gaas surface by the p2s5/nh4oh treatment; instead, gallium sulfide and arsenic sulfide are formed. the passivation film results in a reduction of the density of states of the surface electrons and an improvement of the electronic and optical properties of the gaas surface.
学科主题	半导体物理
收录类别	SCI
语种	英语
公开日期	2010-11-15
内容类型	期刊论文
源URL	[http://ir.semi.ac.cn/handle/172111/14131]
专题	半导体研究所_中国科学院半导体研究所（2009年前）
推荐引用方式 GB/T 7714	ZHONG ZT,LUO WZ,MOU SM,et al. ELECTRONIC SPECTROSCOPY STUDIES OF A P2S5NH4OH TREATED GAS(100) SURFACE[J]. chinese physics,1992,12(4):853-858.
APA	ZHONG ZT,LUO WZ,MOU SM,ZHANG KY,LI X,&LI CF.(1992).ELECTRONIC SPECTROSCOPY STUDIES OF A P2S5NH4OH TREATED GAS(100) SURFACE.chinese physics,12(4),853-858.
MLA	ZHONG ZT,et al."ELECTRONIC SPECTROSCOPY STUDIES OF A P2S5NH4OH TREATED GAS(100) SURFACE".chinese physics 12.4(1992):853-858.