Study on a method of dispensing calibration for photoresist pump based on support vector machine

CORC > 沈阳自动化研究所 > 中国科学院沈阳自动化研究所 > 空间自动化技术研究室

	Study on a method of dispensing calibration for photoresist pump based on support vector machine
	Zhang JL(张吉龙); Hu JT(胡静涛); Cao YX(曹云侠); Chi HD(迟浩东)
	2015
会议名称	2015 IEEE International Conference on Cyber Technology in Automation, Control, and Intelligent Systems (CYBER)
会议日期	June 8-12, 2015
会议地点	Shenyang, China
关键词	coater and developer photoresist pump support vector machine calibrate
页码	1552-1556
中文摘要	Photoresist pump is an important part of coater and developer equipment. High precision control for the amount of photoresist is of great significance to improve the quality of coating and reduce the cost of production. Its working principle is dispensing and reloading photoresist by the positive and negative rotation of its internal stepping motor, and the dispensing amount is determined by the pulse count that the pump controller sends. But due to the linearity error of the pump, viscosity of photoresist, damping of the pipeline, pressure of the outlet and factors such as environmental temperature and humidity, there is a deviation between the dispensing actual value and set value, so calibration is needed. For the above question, firstly, in this paper the support vector machine model of the actual dispensing amount is established by dispensing speed and set value as its input vector construction. Secondly, the dispensing revised value is solved by iterative method, and then the calibration coefficients are calculated. Finally, the validity of this method is verified by experimental results, moreover, the dispensing precision is improved and the time which determining calibration coefficients required is reduced by this method.
收录类别	EI ; CPCI（ISTP）
产权排序	1
会议录	2015 IEEE International Conference on Cyber Technology in Automation, Control, and Intelligent Systems (CYBER)
会议录出版者	IEEE
会议录出版地	Piscataway, NJ, USA
语种	英语
ISSN号	2379-7711
ISBN号	978-1-4799-8730-6
WOS记录号	WOS:000380502300283
内容类型	会议论文
源URL	[http://ir.sia.cn/handle/173321/17521]
专题	沈阳自动化研究所_空间自动化技术研究室
推荐引用方式 GB/T 7714	Zhang JL,Hu JT,Cao YX,et al. Study on a method of dispensing calibration for photoresist pump based on support vector machine[C]. 见:2015 IEEE International Conference on Cyber Technology in Automation, Control, and Intelligent Systems (CYBER). Shenyang, China. June 8-12, 2015.