METHOD FOR REALIZING IC EQUIPMENT CONTROL SOFTWARE-ORIENTED GUI PLATFORMIZATION

CORC > 沈阳自动化研究所 > 中国科学院沈阳自动化研究所 > 工业控制网络与系统研究室

	METHOD FOR REALIZING IC EQUIPMENT CONTROL SOFTWARE-ORIENTED GUI PLATFORMIZATION
	Yu HB(于海斌); Xu AD(徐皑冬); Liu MZ(刘明哲); Li Z(李正); Wang K(王锴); Jin N(金妮); Zhang JL(张吉龙)
	2013-08-22
专利国别	美国
专利号	US2013219306A1
专利类型	发明
产权排序	1
权利人	中国科学院沈阳自动化研究所
其他题名	面向IC装备控制软件的GUI平台化实现方法
中文摘要	The present invention relates to a method for realizing IC (integrate circuit) equipment control software-oriented GUI (graphical user interface) platformization, comprising the following steps: developing a corresponding IC equipment drive module in accordance with the characteristics of different manufacturers' IC equipment and drawing a GUI platform; connecting the monitoring host of the IC equipment to a controller through the IC equipment drive module, thereby forming a communication network; the IC equipment drive module reads data in the controller through the connection network and maps the data to the general data layer of the GUI platform; the GUI platform performs real-time display, control, and exception handling on the data through the general data layer, thus realizing GUI platformization of the IC equipment control software. The present invention realizes a cross-platform mechanism, improves the cluster monitoring ability of the wafer manufacturing equipment, is able to meet the user's demands for flexible configuration of the human-machine interface of the corresponding control system such that the whole production process can be quickly configured in a very short time, and meets the needs of advanced startup of the production.
是否PCT专利	是
申请日期	2010-11-29
语种	英语
专利申请号	US201013879248
内容类型	专利
源URL	[http://ir.sia.cn/handle/173321/17282]
专题	沈阳自动化研究所_工业控制网络与系统研究室
推荐引用方式 GB/T 7714	Yu HB,Xu AD,Liu MZ,et al. METHOD FOR REALIZING IC EQUIPMENT CONTROL SOFTWARE-ORIENTED GUI PLATFORMIZATION. US2013219306A1. 2013-08-22.