Research on the Factory Automation Software Based on the SEMI Standard

CORC > 沈阳自动化研究所 > 中国科学院沈阳自动化研究所 > 工业控制网络与系统研究室

	Research on the Factory Automation Software Based on the SEMI Standard
	Wang CX(王晨曦); Liu MZ(刘明哲); Xu AD(徐皑冬); Jin N(金妮)
	2015
会议名称	2015 3rd International Conference on Material, Mechanical and Manufacturing Engineering (IC3ME 2015)
会议日期	June 27-28, 2015
会议地点	Guangzhou, China
关键词	IC equipment SEMI FA
页码	662-665
中文摘要	Factory automation (FA) system software is a bridge to realize information exchange between processing equipment of semiconductor equipment and factory host. It receives the control instruction sent by a host, and sends the control instruction to the manufacturing equipment after internal analysis and processing. At the same time, FA receives the real time data and the various process parameters sent by equipment, processes the data, and sends the data to the host. In this paper, analysis of the process of semiconductor processing equipment, according to the actual needs of the semiconductor processing equipment, research on FA Software based on the SEMI standard.
收录类别	CPCI（ISTP）
产权排序	1
会议录	PROCEEDINGS OF THE 3RD INTERNATIONAL CONFERENCE ON MATERIAL, MECHANICAL AND MANUFACTURING ENGINEERING
会议录出版者	Atlantis Press
会议录出版地	Paris
语种	英语
ISBN号	978-94-6252-100-1
WOS记录号	WOS:000367097600129
内容类型	会议论文
源URL	[http://ir.sia.cn/handle/173321/17406]
专题	沈阳自动化研究所_工业控制网络与系统研究室
推荐引用方式 GB/T 7714	Wang CX,Liu MZ,Xu AD,et al. Research on the Factory Automation Software Based on the SEMI Standard[C]. 见:2015 3rd International Conference on Material, Mechanical and Manufacturing Engineering (IC3ME 2015). Guangzhou, China. June 27-28, 2015.