Further improving the mechanical and tribological properties of low content Ti-doped DLC film by W incorporating

CORC > 兰州化学物理研究所 > 中国科学院兰州化学物理研究所 > 先进润滑与防护材料研究发展中心

	Further improving the mechanical and tribological properties of low content Ti-doped DLC film by W incorporating
	Qiang L(强力)1 ; Gao KX(高凯雄)1 ; Zhang LF(张礼芳)1; Wang, Jian 1,2; Zhang B(张斌)1 ; Zhang JY(张俊彦)1 ; Zhang JY(张俊彦); Zhang B(张斌)
刊名	Applied Surface Science
	2015
卷号	353 页码:522-529
关键词	W/Ti-doped DLC film Internal stress Mechanical properties Tribological performance
ISSN号	0169-4332
通讯作者	张斌 ; 张俊彦
英文摘要	W/Ti-doped diamond-like carbon (DLC) films were fabricated on Si substrates by co-sputtering W and Ti targets in methane and argon mixture atmosphere. The composition and the microstructure, internal stress, mechanical and tribological properties of the films were measured by X-ray photoelectron spectroscopy (XPS), high-resolution transmission electron microscopy (HRTEM), Raman spectra, BGS 6341 type film stress tester, nano-indentor and reciprocating ball-on-disc tester, respectively. The results indicated all films showed the amorphous structural characteristics and a constant thickness value of ∼600 nm (195 ± 15 nm Ti interlayer was designed in order to minimize the influence of Ti interlayer), and the Ti content increased from 0 to 34.5% as the W target current increased from 0 A to 14 A. As the W concentration increased from 0 to 2.6 at.%, the hardness increased to 12.7 GPa and the internal stress maintained at a low value and almost no change. Meanwhile, the friction coefficient and wear rate showed the lowest value (0.023 and 1.2 × 10⁻⁸ mm³/N m, respectively). With the W content increased to 34.5 at.% further, the internal stress, friction coefficient and wear rate of film are dramatically increased.
学科主题	材料科学与物理化学
收录类别	SCI
资助信息	the 973 program 2013CB632300;the National Natural Science Foundation of China (Grant no. 51275508;51205383)
语种	英语
WOS记录号	WOS:000361220700067
内容类型	期刊论文
源URL	[http://210.77.64.217/handle/362003/18662]
专题	兰州化学物理研究所_先进润滑与防护材料研究发展中心兰州化学物理研究所_固体润滑国家重点实验室
通讯作者	Zhang JY(张俊彦); Zhang B(张斌)
作者单位	1.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China 2.Lanzhou Univ Technol, Sch Petr Chem Engn, Lanzhou 730050, Peoples R China
推荐引用方式 GB/T 7714	Qiang L,Gao KX,Zhang LF,et al. Further improving the mechanical and tribological properties of low content Ti-doped DLC film by W incorporating[J]. Applied Surface Science,2015,353:522-529.
APA	Qiang L.,Gao KX.,Zhang LF.,Wang, Jian.,Zhang B.,...&张斌.(2015).Further improving the mechanical and tribological properties of low content Ti-doped DLC film by W incorporating.Applied Surface Science,353,522-529.
MLA	Qiang L,et al."Further improving the mechanical and tribological properties of low content Ti-doped DLC film by W incorporating".Applied Surface Science 353(2015):522-529.