The role of trace Ti concentration on the evolution of microstructure and properties of duplex doped Ti(Ag)/DLC films

CORC > 兰州化学物理研究所 > 中国科学院兰州化学物理研究所 > 先进润滑与防护材料研究发展中心

	The role of trace Ti concentration on the evolution of microstructure and properties of duplex doped Ti(Ag)/DLC films
	Ji L(吉利)1 ; Wu YX(吴艳霞)1,2 ; Li HX(李红轩)1 ; Song H(宋惠)1,2 ; Liu XH(刘晓红)1 ; Ye YP(冶银平)1 ; Chen JM(陈建敏)1 ; Zhou HD(周惠娣)1 ; Liu, Liu 3; Ji L(吉利)
刊名	Vacuum
	2015
卷号	115 页码:23-30
关键词	Ti(Ag)/a-C:H film Microstructure Mechanical properties Tribological properties
ISSN号	0042-207X
通讯作者	吉利 ; 李红轩
英文摘要	Trace Ag–Ti co-doped diamond-like carbon (DLC) films were prepared on stainless steel and silicon (100) substrates by medium frequency unbalanced magnetron sputtering with Ar and CH₄ as source gases. The effects of sputtering current of Ti target on the microstructure, mechanical and tribological properties were investigated with the content and format of the doped Ag keeping constant. It can be seen the Ti concentration and sp²C content in the film increase with increasing Ti sputtering current. Furthermore, the doped Ti species changed from the form of metallic phase to TiC with increasing Ti concentration, and the hardness and internal stress of the film decrease firstly and then increase, which is related with the microstructural change induced by trace Ti incorporation. Finally, the duplexed-nanocomposite film with 1.600 at.% Ti shows relatively high hardness and H/E and H³/E² ratio, which is mainly responsible for the superior tribological properties.
学科主题	材料科学与物理化学
收录类别	SCI
资助信息	the 973 Project of China (No. 2013CB632300);the National Natural Science Foundation of China (Grant No. 51275509;51405474)
语种	英语
WOS记录号	WOS:000352177300005
内容类型	期刊论文
源URL	[http://210.77.64.217/handle/362003/18405]
专题	兰州化学物理研究所_先进润滑与防护材料研究发展中心兰州化学物理研究所_固体润滑国家重点实验室
通讯作者	Ji L(吉利); Li HX(李红轩)
作者单位	1.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China 2.Chinese Acad Sci, Grad Univ, Beijing 100049, Peoples R China 3.Tianshui Normal Univ, Coll Life Sci & Chem, Tianshui 741000, Peoples R China
推荐引用方式 GB/T 7714	Ji L,Wu YX,Li HX,et al. The role of trace Ti concentration on the evolution of microstructure and properties of duplex doped Ti(Ag)/DLC films[J]. Vacuum,2015,115:23-30.
APA	Ji L.,Wu YX.,Li HX.,Song H.,Liu XH.,...&李红轩.(2015).The role of trace Ti concentration on the evolution of microstructure and properties of duplex doped Ti(Ag)/DLC films.Vacuum,115,23-30.
MLA	Ji L,et al."The role of trace Ti concentration on the evolution of microstructure and properties of duplex doped Ti(Ag)/DLC films".Vacuum 115(2015):23-30.